QUADRANT EPP INTRODUCES NEXT GENERATION MATERIALS FOR SEMICONDUCTOR MANUFACTURING

Tielt, Belgium – June, 2007 – Longer production life of critical components in semiconductor wafer chemical mechanical planarization (CMP) processes is possible with new materials available from Quadrant Engineering Plastic Products (Quadrant EPP). Semitron® CMP LL5 and Semitron® CMP XL20 offer service life from five to 20 times greater than materials currently used to make retaining rings, which hold the wafer in position as it is being planarised.

The materials are available in stock shapes in tubular form for machining the critical tolerance CMP ring applications.

According to Fred Sanford, Quadrant EPP’s Business Manager for the products, “After we developed Techtron® polyphenylene sulphide (PPS) almost 15 years ago, it became the standard for extended life in CMP rings. However, engineers have been working with us to develop longer life materials to extend production run times before maintenance and replacement. We are pleased to offer two new materials, one of which can reduce the cost of currently-used PPS consumable rings by half and improve production life five-fold, and another that extends CMP ring life up to 20 times.”

Based on a modified polyamide-imide, Semitron® CMP XL20 consistently outlasts all other engineering plastics in all major process environments. Compared to PPS, it lasts up to 20 times longer. “Semitron® CMP XL20,” said Sanford, “is the highest level of technology for optimal performance life, productivity and cost in use. It is the next generation standard, and it is available today.”

Testing in production conditions for Semitron® CMP XL20 began in 2006 in cooperation with equipment builders and wafer fabrication facilities, or fabs. Results validate Quadrant EPP’s laboratory testing, showing extended life compared to other materials. Its characteristics combined with design enhancements dramatically extended the mean time between maintenance cycles at one wafer fab, yielding significant cost savings per wafer per tool.

Semitron® CMP LL5 is based on an enhanced polyester. Laboratory simulations show that it extends ring life by as much as five times over rings made of PPS. It offers lower cost compared to traditional PPS, is suitable for use in all CMP processes, and is ideal for ring designs that have steel or ceramic reinforcement. It has already become a favoured option for 200mm rings, given supply constraints on traditional PPS based products, and it offers significant life extension and cost reduction in standard oxide etching processes.

Reader enquiries

Quadrant EPP
Hardstrasse 5
5600 Lenzburg
SWITZERLAND
Switzerland
+ 41 62 8858 150
contact@​qplas.com
http://epp.quadrantplastics.com

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Notes for editors

About Quadrant EPP

Quadrant Engineering Plastic Products (Quadrant EPP) is the world's leading manufacturer of engineering plastics in stock shapes (rod, plate, tube) for machining. Other specialities include custom nylon castings and finished parts. Quadrant EPP's catalogue of General and Advanced Engineering Plastics covers the broadest range (in terms of materials and dimensions) of standard and custom shapes for machining. Products are available through a worldwide network of branch offices, technical support centres and authorized dealers.

Learn more about Quadrant EPP at www.quadrantplastics.com

About the Quadrant group

Quadrant, a global leader in high-performance polymer materials in the form of semi-finished and finished products with locations in 18 countries, generates annual sales of over CHF 800 million. The specialty engineering thermoplastics and composites manufactured and marketed by more than 2’400 employees worldwide are superior in performance to metals and other materials and are used in a growing number of applications, primarily in the capital goods industry. Together with leaders in a wide range of customer markets, Quadrant is continuously developing new areas of application. Thanks to its clear strategic orientation and focus, Quadrant has generated substantial added value for customers and shareholders since it was established in 1996 and is well prepared to continue expanding its market leadership in future.